Počet kreditů 4
Vyučováno v Winter and summer
Rozsah výuky 2P+2C
Garant předmětu
Přednášející Miroslav Husák
Cvičící Miroslav Husák

Fundamental concepts and classification of microsystems. Micro-sensors. Micro-actuators. Signal processing within the system. MEMS (micro-electrical-mechanical structures). MOES (micro-optical-electrical structures). MEMOS (micro-electrical-mechanical-optical structures). Microsystem design. Microsystem modelling. Manufacturing technologies. Materials. Industrial applications. Medical applications.

1. Fundamental concepts and classification of microsystems
2. Microsystems within the European research and their market chances
3. Micro-sensors
4. Micro-actuators
5. Signal processing within the system
6. MEMS (micro-electrical-mechanical structures)
7. MOES (micro-optical-electrical structures)
8. MEMOS (micro-electrical-mechanical-optical structures)
9. Microsystem design
10. Microsystem modelling
11. Manufacturing technologies
12. Materials
13. Industrial applications
14. Medical applications

1. Beeby,S., Ensell,G., Kraft,M., White,N.: MEMS Mechanical Sensors. Artech
House, Boston, 2004.
2. Pelesko,J.A., Bernstein,D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC,
Boca Raton, 2003.
3. Varadan,V.K., Vinoy,K.J., Jose,K.A.: RF MEMS and their applications.
Wiley, Chichester, 2003.

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