Microsystems

B232 - Summer 23/24
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Microsystems - XP34MSY

Student survey results
Credits 4
Semesters Both
Completion Exam
Language of teaching Czech
Extent of teaching 2P+2C
Annotation
Fundamental concepts and classification of microsystems. Micro-sensors. Micro-actuators. Signal processing within the system. MEMS (micro-electrical-mechanical structures). MOES (micro-optical-electrical structures). MEMOS (micro-electrical-mechanical-optical structures). Microsystem design. Microsystem modelling. Manufacturing technologies. Materials. Industrial applications. Medical applications.
Study targets
No data.
Course outlines
1. Fundamental concepts and classification of microsystems
2. Microsystems within the European research and their market chances
3. Micro-sensors
4. Micro-actuators
5. Signal processing within the system
6. MEMS (micro-electrical-mechanical structures)
7. MOES (micro-optical-electrical structures)
8. MEMOS (micro-electrical-mechanical-optical structures)
9. Microsystem design
10. Microsystem modelling
11. Manufacturing technologies
12. Materials
13. Industrial applications
14. Medical applications
Exercises outlines
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Literature
1. Beeby,S., Ensell,G., Kraft,M., White,N.: MEMS Mechanical Sensors. Artech
House, Boston, 2004.
2. Pelesko,J.A., Bernstein,D.H.: Modeling MEMS and NEMS. Chapman & Hall/CRC,
Boca Raton, 2003.
3. Varadan,V.K., Vinoy,K.J., Jose,K.A.: RF MEMS and their applications.
Wiley, Chichester, 2003.
Requirements
c