Moodle FEL ČVUT
Microsystems
B242 - Letní 2024/2025
Toto je tzv. shluknutý kurz. Skládá se z několika samostatných předmětů, které sdílejí výukové materiály, úkoly, testy apod. Níže si můžete zobrazit informace o jednotlivých předmětech tvořících tento shluk.
Microsystems - BE2M34MST
Hlavní kurz
| Kredity | 6 |
| Semestry | letní |
| Zakončení | Zápočet a zkouška |
| Jazyk výuky | angličtina |
| Rozsah výuky | 2P+2L |
Anotace
Předmět se zabývá systémovou integrací uplatňovanou při návrhu digitálních a analogových systémů s uplatňováním systémového inženýrství, řeší propojení různých typů moderních elektronických systémů na čipu a externích. Ukazuje na nové možnosti realizace a aplikace integrovaných mikrosoučástí pracujících s různými fyzikálními a biochemickými principy a veličinami využívajícími především MEMS technologii, zvyšování spolehlivost se všemi jejími atributy. Předmět představuje moderní akční prvky mikroaktuátory, jejichž činnost je založena na základních fyzikálních a biochemických principech, včetně základních aplikací v mikromanipulaci, mikrorobotech, mikropohonech, mikrochirurgii, multimédiích, medicíně, průmyslu, řízení, automobilismu, apod. V předmětu jsou uvedeny principy dotykových displejů, mikrogenerátorů energie. Jsou zde zmíněny základní prvky využití nanotechnologií a nanoelektronických struktur, základní mikrosystémové technologie.
Výsledek studentské ankety předmětu je zde: Výsledek studentské ankety předmětu je zde: http://www.fel.cvut.cz/anketa/aktualni/courses/A2M34MST
Výsledek studentské ankety předmětu je zde: Výsledek studentské ankety předmětu je zde: http://www.fel.cvut.cz/anketa/aktualni/courses/A2M34MST
Cíle studia
Gaining knowledge about the current and future development of systems on a chip, the integration of on-chip, electrical and non-electrical action systems, usage of basic physical phenomena for applications in electronics, optics, communications, medicine and aviation, in the realization of miniature generators from renewable energy sources - excluding the photovoltaics.
Osnovy přednášek
1. Microsystems structures, energy domains, importance, interdisciplinary, applications, system integration of digital and analog systems, multi-chip configuration
2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration
3. Micro-actuators parameters, scaling
4. Tactile sensors and touch screens, biometric devices, from graphite to graphene
5. Basic mechanisms and structures used in micro-actuators
6. Electrostatic linear and rotary actuators components - basic physical principles and application
7. Electrostatic micromanipulators and micro-motors
8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators
9. Heat and magnetic principle - micro-actuators mechanisms
10. Mechanical Systems and micro-actuators mechanisms
11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip
12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)
13. Micro-generators based on Energy Harvesting
14. Nanoscale systems
2. Physical phenomena, design methods, interconnection of systems-on-chip and external devices, process control, communication and evaluation, system reliability and its increasing by integration
3. Micro-actuators parameters, scaling
4. Tactile sensors and touch screens, biometric devices, from graphite to graphene
5. Basic mechanisms and structures used in micro-actuators
6. Electrostatic linear and rotary actuators components - basic physical principles and application
7. Electrostatic micromanipulators and micro-motors
8. Piezoelectric micro-actuators mechanisms, micro-motors and micromanipulators
9. Heat and magnetic principle - micro-actuators mechanisms
10. Mechanical Systems and micro-actuators mechanisms
11. Chemical and biochemical principles - micro-actuators mechanisms, intelligent microsystems structures for chemical and biochemical analysis, Lab-on-Chip
12. RF MEMS and MOEMS structures, (electronic switches, filters, optical switches, optical mirrors, tunable capacitors, etc.)
13. Micro-generators based on Energy Harvesting
14. Nanoscale systems
Osnovy cvičení
1. Introduction, organization of the seminars, introduction to safety in work
2. Semester project selection, registration for excursion
3. Introduction to the programs Coventor and Ansys
4. Simulation and modeling of basic MEMS structures in Ansys
5. Simulation and modeling of basic MEMS structures in Ansys
6. Simulation and modeling of basic MEMS structures in Ansys, Preparation for excursion
7. Excursion, practical exercise in clean rooms
8. Simulation and modeling of basic MEMS structures in Ansys
9. Laboratory exercise - Application of the material printer
10. Laboratory exercise - Characterization of the fabricated structures
11. Measurement - practical applications of the MEMS structures
12. Presentation of semester projects
13. Presentation of semester projects
14. Additional measurements: completion of missing measurement tasks, assessment
2. Semester project selection, registration for excursion
3. Introduction to the programs Coventor and Ansys
4. Simulation and modeling of basic MEMS structures in Ansys
5. Simulation and modeling of basic MEMS structures in Ansys
6. Simulation and modeling of basic MEMS structures in Ansys, Preparation for excursion
7. Excursion, practical exercise in clean rooms
8. Simulation and modeling of basic MEMS structures in Ansys
9. Laboratory exercise - Application of the material printer
10. Laboratory exercise - Characterization of the fabricated structures
11. Measurement - practical applications of the MEMS structures
12. Presentation of semester projects
13. Presentation of semester projects
14. Additional measurements: completion of missing measurement tasks, assessment
Literatura
1. Fraden,J.: Handbook of modern sensors. American institut of physics, Woodbury 1997
2.Tuller,H.L, Microactuators, Kluwer 1998
2.Tuller,H.L, Microactuators, Kluwer 1998
Požadavky
None
Microsystems - AE2M34MST
| Kredity | 5 |
| Semestry | zimní |
| Zakončení | Zápočet a zkouška |
| Jazyk výuky | čeština |
| Rozsah výuky | 2P+2L |
Anotace
The subject solves the system integration in the design of the digital as well as analogue systems with help of an system engineering, one solves a connection of a different types of the modern electronic systems on-chip as well as a external. There are showed the new possibilities of a realisation and the application of the integrated elements operated by the different principles in the subject. Integrated elements are designed primarily in MEMS technologies. The subject involves a reliability of the systems. There are introduced the modern elements - microactuators operated on the different principles including the basic applications in the industry, medicine, control, automotive, etc. The basic nanotechnology elements and structures for the electronics are discussed. \\Výsledek studentské ankety předmětu je zde: http://www.fel.cvut.cz/anketa/aktualni/courses/AE2M34MST
Cíle studia
Získání nových poznatků o současné a budoucím vývoji systémů na čipu, integraci na čipu elektrických a neelektrických akčních systémů, využití základních fyzikálních jevů pro aplikace v elektronice, optice, komunikacích, medicíně, ale i v letectví a kosmickém prostoru, v oblasti realizace miniaturních generátorů z oblasti obnovitelných zdrojů mimo fotovoltaiky.
Osnovy přednášek
1. The system integration of the digital and the analogue systems
2. Design methods, the connection on the chip as well as external
3. The design control, the communication and the evaluation
4. The reliability of systems, the reliability enhance (integration)
5. The integration, material properties, the multichip arrangement
6. Microsystems, the microsystems structures, energy domains
7. Actuators - main used physical and biochemical principles, scaling
8. MEMS and MOEMS structures, structures of MEMS elements as well as RF elements (electronic switches, filters, optical switches, tunable capacity, etc.)
9. Electrostatic linear and rotary actuators, manipulators and micromotors
10. Piezoelectric microactuators, manipulators and micromotors
11. Magnetic and temperature actuators
12. Optical and mechanical microactuators and microdrivers
13. Tactile sensors, touch displays, biometric elements
14. Microsystems technologies including MEMS
2. Design methods, the connection on the chip as well as external
3. The design control, the communication and the evaluation
4. The reliability of systems, the reliability enhance (integration)
5. The integration, material properties, the multichip arrangement
6. Microsystems, the microsystems structures, energy domains
7. Actuators - main used physical and biochemical principles, scaling
8. MEMS and MOEMS structures, structures of MEMS elements as well as RF elements (electronic switches, filters, optical switches, tunable capacity, etc.)
9. Electrostatic linear and rotary actuators, manipulators and micromotors
10. Piezoelectric microactuators, manipulators and micromotors
11. Magnetic and temperature actuators
12. Optical and mechanical microactuators and microdrivers
13. Tactile sensors, touch displays, biometric elements
14. Microsystems technologies including MEMS
Osnovy cvičení
1. The time schedule, the security in laboratory, the system engineering, the system integration
2. The calculation of the system reliability
3. The design of multichip connection, EMC on the chip as well as on the integrated system
4. CoventorWare software for the microsystem structure design
5. The practical design of structures by support of CoventorWare (cantilever, membrane)
6. The electrostatic microactuator and micromotor
7. The electrostatic manipulator
8. The electrostatic optical switch
9. The electrostatic MEMS microphone and speaker
10. The piezoelectric actuator and microshift
11. The thermal actuator
12. The magnetic actuator
13. The design of MEMS switches
14. Credits
2. The calculation of the system reliability
3. The design of multichip connection, EMC on the chip as well as on the integrated system
4. CoventorWare software for the microsystem structure design
5. The practical design of structures by support of CoventorWare (cantilever, membrane)
6. The electrostatic microactuator and micromotor
7. The electrostatic manipulator
8. The electrostatic optical switch
9. The electrostatic MEMS microphone and speaker
10. The piezoelectric actuator and microshift
11. The thermal actuator
12. The magnetic actuator
13. The design of MEMS switches
14. Credits
Literatura
1. Tuller,H.L, Microactuators, Kluwer 1998
2. Busch-Vishniac,I.,J.: Electromechanical Sensors and Actuators, Springer, 2003
2. Busch-Vishniac,I.,J.: Electromechanical Sensors and Actuators, Springer, 2003
Požadavky
https://moodle.kme.fel.cvut.cz/moodle/login/index.php?lang=cs